Fabrication of Impedimetric Transducers Using a Compact and Low-Cost Prototype for Photolithography

Abstract

Impedimetric gold transducers were fabricated on glass substrates using a simple photolithography method without requiring a photolithography machine. An acetate sheet containing printed electrode designs and edge markings for alignment during pattern transfer was used as photomask. A compact pattern phototransfer system named Expotransfer, was designed for this process. Gold deposition was performed by electron beam evaporation. The electrodes obtained have a diameter of 2 mm with a minimum line thickness of of 250 μm and the separation between patterns of equal magnitude. Electrochemical impedance spectroscopy (EIS) tests showed a predominantly capacitive behavior in the frequency range of 100 kHz to 1 kHz, which follows a parallel plate model. Repeatability between the manufactured electrodes was also achieved.