Digital rate MEMS vibratory gyroscope modeling, tuning and simulation results

Abstract

This paper is dealing with modeling, tuning and simulation of standing wave control and information processing algorithm for rate MEMS ring-type vibratory gyroscope. Standing wave control algorithm is presented in the form allowing transition from rate to rate integrating and to differential modes of MEMS gyro operation by simple switching command. It enables to implement triple mode MEMS gyro. Block diagrams of the standing wave control algorithm and resonance frequency tracking subsystem are presented. Drive and compensation signal phases tuning are described. Detailed explanations to the main operations which are used in information processing algorithm are given. Also, simulation results in case of measurement of a constant and variable angle rates are presented.