Fabrication of Impedimetric Transducers Using a Compact and Low-Cost Prototype for Photolithography

Authors

  • Alejandra Pérez-Nava Centro de Investigación y Desarrollo Tecnológico en Electroquímica
  • Goldie Oza Centro de Investigación y Desarrollo Tecnológico en Electroquímica
  • José Herrera-Celis Universidad Industrial de Santander

DOI:

https://doi.org/10.13053/cys-29-2-5703

Keywords:

Gold transducers, no photolithography machine, electrochemical impedance spectroscopy

Abstract

Impedimetric gold transducers were fabricated on glass substrates using a simple photolithography method without requiring a photolithography machine. An acetate sheet containing printed electrode designs and edge markings for alignment during pattern transfer was used as photomask. A compact pattern phototransfer system named Expotransfer, was designed for this process. Gold deposition was performed by electron beam evaporation. The electrodes obtained have a diameter of 2 mm with a minimum line thickness of of 250 μm and the separation between patterns of equal magnitude. Electrochemical impedance spectroscopy (EIS) tests showed a predominantly capacitive behavior in the frequency range of 100 kHz to 1 kHz, which follows a parallel plate model. Repeatability between the manufactured electrodes was also achieved.

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Published

2025-06-18

Issue

Vol. 29 No. 2 (2025): 29(2) 2025

Section

Articles of the Thematic Section

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